Journal
MICROELECTRONICS JOURNAL
Volume 40, Issue 1, Pages 78-82Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2008.06.080
Keywords
Inclinometer; Piezoresistive; MEMS; Test
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The design, fabrication and test of a novel MEMS inclinometer were described. This inclinometer was based on the piezoresistive detection method, and was fabricated by SOI process. The micro-structure of the inclinometer was a four vertical cantilever beams, a center mass with a rigid cylinder fixed on it. The piezoresistors fabricated on the beams were used to detect the deformation of the cantilevers caused by the gravity. A test system was designed in this paper, from the test results We found that this inclinometer had a sensitivity of 0.025 mV/degrees, and the test results and the theoretical results are in well agreement, the standard deviation is 0.43874. Crown Copyright (c) 2008 Published by Elsevier Ltd. All rights reserved.
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