Investigation of ZnO nanopillars fabrication in a new Thomas Swan close coupled showerhead MOCVD reactor

Published 2008 View Full Article

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Title
Investigation of ZnO nanopillars fabrication in a new Thomas Swan close coupled showerhead MOCVD reactor
Authors
Keywords
-
Journal
MICROELECTRONICS JOURNAL
Volume 40, Issue 2, Pages 280-282
Publisher
Elsevier BV
Online
2008-09-10
DOI
10.1016/j.mejo.2008.07.026

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