Single-spot e-beam lithography for defining large arrays of nano-holes

Published 2014 View Full Article

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Title
Single-spot e-beam lithography for defining large arrays of nano-holes
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 121, Issue -, Pages 104-107
Publisher
Elsevier BV
Online
2014-04-03
DOI
10.1016/j.mee.2014.03.025

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