Effect of moisture on electrical properties and reliability of low dielectric constant materials

Title
Effect of moisture on electrical properties and reliability of low dielectric constant materials
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 114, Issue -, Pages 12-16
Publisher
Elsevier BV
Online
2013-09-10
DOI
10.1016/j.mee.2013.08.018

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