Low-k a-SiCO:H films as diffusion barriers for advanced interconnects

Published 2013 View Full Article

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Title
Low-k a-SiCO:H films as diffusion barriers for advanced interconnects
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 120, Issue -, Pages 221-224
Publisher
Elsevier BV
Online
2013-12-20
DOI
10.1016/j.mee.2013.12.022

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