Fabrication of self-supporting antireflection-structured film by UV–NIL

Published 2013 View Full Article

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Title
Fabrication of self-supporting antireflection-structured film by UV–NIL
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 110, Issue -, Pages 163-166
Publisher
Elsevier BV
Online
2013-03-27
DOI
10.1016/j.mee.2013.03.041

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