Ferromagnetic shadow mask for spray coating of polymer patterns

Published 2013 View Full Article

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Title
Ferromagnetic shadow mask for spray coating of polymer patterns
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 110, Issue -, Pages 427-431
Publisher
Elsevier BV
Online
2013-03-18
DOI
10.1016/j.mee.2013.03.029

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