Article
Chemistry, Multidisciplinary
Christine Thanner, Martin Eibelhuber
Summary: The UV Nanoimprint Lithography is efficient in producing resist layers with features ranging from micrometers to nanometers. Understanding material properties, pattern size, and shape is crucial for optimizing processes for reliable manufacturing. Comparing results for different pattern geometries can provide a helpful overview of relevant process parameters.
Article
Polymer Science
Sruthi Venugopal Oopath, Avinash Baji, Mojtaba Abtahi
Summary: This study aims to produce a hydrophobic polymer film by mimicking the hierarchical micro/nanostructures found on the surface of rose petals. The presence of these structures on the polyurethane acrylate (PUA) film influenced its wettability behavior, leading to a highly hydrophobic surface. The film also displayed the water pinning effect, similar to natural materials.
Article
Nanoscience & Nanotechnology
Wei-Shen Chen, Yung-Chun Lee
Summary: This paper introduces a new type of nanoimprinting method, called Bi-layer nanoimprinting lithography (BL-NIL), which can be used along with metal-assisted chemical etching (MaCE) to fabricate nanostructures on silicon. This innovative approach guarantees cleanliness at the metal/silicon interface after metal lift-off processes and allows for the replication and preservation of expensive silicon molds with sub-micrometer/nanometer-scale feature sizes.
Article
Chemistry, Multidisciplinary
Michael Muehlberger, Stephan Ruttloff, Dieter Nees, Amiya Moharana, Maria R. Belegratis, Philipp Taus, Sonja Kopp, Heinz D. Wanzenboeck, Adrian Prinz, Daniel Fechtig
Summary: This study demonstrated the process of UV-based nanoimprinting using a proprietary imprint material, successfully replicating multi-layer undercut stamps and producing multi-layer undercut nanoimprinted samples.
Article
Chemistry, Multidisciplinary
Jun Iwata, Tadashi Ando
Summary: In this study, molecular dynamics simulations were used to investigate the filling process of few-nanometer-wide trenches in UV-NIL. The results showed that resist materials with low viscosities were able to successfully fill the trenches, while resist materials with high viscosity could not. The study also compared the properties of linear photopolymers and found that TPGDA, which is more flexible and can adopt more conformations, had a higher probability of intra-molecular crosslinking. These findings provide valuable information for selecting and designing resists for fine patterning in UV-NIL.
Article
Chemistry, Multidisciplinary
Mirko Lohse, Manuel W. Thesen, Anja Haase, Martin Smolka, Nerea Briz Iceta, Ana Ayerdi Izquierdo, Isbaal Ramos, Clarisa Salado, Arne Schleunitz
Summary: This study presents the fabrication process of a novel network of micron-sized channels using UV-nanoimprint lithography, along with an evaluation of a suitable UV-curable material. The results suggest that the given pattern, in combination with the resist, can lead to faster, cheaper, and more reliable drug screening.
Article
Engineering, Multidisciplinary
V. A. Seleznev, V. S. Tumashev, H. Yamaguchi, V. Ya. Prinz
Summary: A new method for fabricating large-area metal and semiconductor nanobridge arrays is proposed in this article, which combines the possibilities offered by nanotransfer printing and UV lithography. The method involves imprinting an array of nanostrips into a resist layer and subsequent UV exposure through an additional mask to define the regions where suspended nanostrip bridges will be formed. Using this method, large-area arrays of Au and Ti/Au nanobridge, as well as SiGe nanobridge arrays, were successfully fabricated. The proposed method is simple, low-cost, and can be implemented on solid and polymer substrates.
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
(2023)
Article
Chemistry, Physical
Abhaysinh Gaikwad, Salil Desai
Summary: Understanding the deformation behavior during nanoimprint lithography is crucial for high resolution patterning. Molecular dynamics modeling was used to investigate how different mold profiles affect von Mises stress, lattice dislocations, and material deformation. Higher stress was observed for spherical molds compared to rectangular and cylindrical molds. During mold penetration stage, stress increased for all mold geometries but reduced during relaxation and mold retrieval stages. The findings can aid in mold design for various applications.
Article
Chemistry, Physical
Yan Gu, Yishuo Zhang, Jieqiong Lin, Huibo Zhao, Haihang Ma, Hongwei Yao, Mingshuo Kang, Bin Fu, Silin Liu
Summary: In this study, a piezoelectric-driven vibration-assisted UV nanoimprint method was proposed to improve the performance of diffraction gratings. It was found that introducing one-dimensional lateral vibrations with low frequency and low amplitude improved surface quality and filling rate of the grating. The effects of grating properties and vibration parameters were investigated, and a novel asymmetric vibration stage was designed. The method was verified to accurately fabricate diffraction gratings with superior performance.
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
(2023)
Article
Chemistry, Physical
E. Cheng, Suzhou Tang, Lingpeng Liu, Helin Zou, Zhengyan Zhang
Summary: UV lithography parameters were optimized to achieve a significant decrease in the width dimension of photoresist patterns from microscale to nano-scale. The influences of etching time on SiO2 film over-etching amount and nano-mold depth were analyzed to further reduce the width of nano-mold. Additionally, the effect of photoresist mesas deformation on nano-mold fabrication was studied to improve the quality of nano-mold.
SURFACE REVIEW AND LETTERS
(2021)
Article
Energy & Fuels
Yan Gu, Jichen Xu, Jieqiong Lin, Haihang Ma, Huibo Zhao, Yishuo Zhang, Baoyu Sun
Summary: This study proposes a vibration-assisted UV nanoimprint lithography technique to effectively improve the power conversion efficiency (PCE) of Si solar cells. By applying piezoelectric vibration, the contact area between the photoresist and the grating's side wall is increased, reducing surface tension and increasing the photoresist filling rate by 25%. The best grating parameters are determined using Finite Difference Time Domain (FDTD) and vibration-assisted UV nanoimprint is used to fabricate the periodic grating structures, resulting in a 25% increase in PCE compared to bare Si solar cells.
Article
Engineering, Chemical
Nomin Lim, Alexander Efremov, Kwang-Ho Kwon
Summary: Through a comparative study of different gas mixtures on the kinetics of silicon reactive-ion etching, it was found that substituting Ar for O-2 does not affect the polymerizing ability and F/C ratio of the original fluorocarbon molecule, but reduces the density of polymerizing radicals. The dominant etching mechanism in all three gas systems is chemical etching provided by F atoms.
PLASMA CHEMISTRY AND PLASMA PROCESSING
(2021)
Article
Chemistry, Analytical
Ryosuke Nishitsuji, Kenji Sueyoshi, Hideaki Hisamoto, Tatsuro Endo
Summary: This study presents a device that can simultaneously measure the mass and refractive index information of a analyte by directly fabricating gold nanostructures on the surface of a quartz crystal microbalance (QCM). The device was easily fabricated using nanoimprint lithography. The nanoparticle adsorption on the gold nanostructures was evaluated as a proof of concept, and the mass and refractive index information were successfully obtained without device-to-device errors.
Article
Chemistry, Multidisciplinary
Philipp Taus, Adrian Prinz, Heinz D. Wanzenboeck, Patrick Schuller, Anton Tsenov, Markus Schinnerl, Mostafa M. Shawrav, Michael Haslinger, Michael Muehlberger
Summary: This study demonstrates different approaches for generating sophisticated undercut T-shaped masters suitable for nanoimprint lithography, successfully fabricating single-layer and multilayer undercut T-shaped structures, which can be applied to replicate structural colors on artificial surfaces in the future.
Article
Engineering, Electrical & Electronic
Mingjie Li, Yulong Chen, Wenxin Luo, Xing Cheng
Summary: In this work, adhesion and friction stresses were measured to reduce the total demolding force in nanoimprint lithography. The introduction of a conformal Al2O3 layer and an anti-adhesion layer helped to lower both the adhesion and friction stresses, leading to a decreased defect rate in UV-NIL processes.
MICROELECTRONIC ENGINEERING
(2021)
Review
Radiology, Nuclear Medicine & Medical Imaging
Sung Won Youn, Jongmin Lee
Summary: Considering the interaction between flow and vessel wall, hemodynamic assessment of the neurovascular system provides a comprehensive solution for both diagnosis and management, adding prognostic significance. 4D flow MRI techniques have advantages in evaluating neurovascular diseases by visualizing and measuring flow parameters while simultaneously assessing vessel wall conditions.
JOURNAL OF MAGNETIC RESONANCE IMAGING
(2022)
Review
Materials Science, Multidisciplinary
Ning Wang, Qing Wang, Shuangshuang Xu
Summary: Superhydrophobic (SHPB) materials have been widely applied in civil engineering, including architectural engineering, road and bridge engineering, heating and ventilation engineering, and structural engineering in marine environment. Despite some durability issues, SHPB materials are expected to make important contributions to the multifunctional development of civil engineering in the future.
ADVANCED ENGINEERING MATERIALS
(2022)
Article
Polymer Science
Haohui Zhang, Qing Wang, Yao Li, Junheng Mao, Xu Zheng
Summary: A mortar coating with damage indication and self-healing properties based on microcapsules was developed. Self-healing microcapsules were synthesized using urea formaldehyde resin and epoxy resin, while damage-indicator microcapsules were fabricated using leuco dye crystal violet lactone and polymethyl methacrylate. The particle size of the microcapsules decreased with increasing emulsifier content and stirring speed. The self-healing microcapsules were able to fill micro-cracks and slow down the development speed of mortar coating cracks.
JOURNAL OF APPLIED POLYMER SCIENCE
(2022)
Article
Radiology, Nuclear Medicine & Medical Imaging
Roh-Eul Yoo, Seung Hong Choi, Sung-Won Youn, Moonjung Hwang, Eunkyung Kim, Byung-Mo Oh, Ji Ye Lee, Inpyeong Hwang, Koung Mi Kang, Tae Jin Yun, Ji-Hoon Kim, Chul-Ho Sohn
Summary: This study found that mTBI patients with PCS had lower average MVF in the bilateral cerebral WM compared to controls, as well as significantly decreased myelin volume in the corpus callosum and brainstem. Total myelin volume was also reduced in these patients. Additionally, there was a significant correlation between myelin volume and neuropsychological test scores only in the bilateral cerebral WM and verbal learning test.
KOREAN JOURNAL OF RADIOLOGY
(2022)
Article
Construction & Building Technology
Junheng Mao, Qing Wang, Lei Qu, Haohui Zhang, Zengqin Shi, Shuangshuang Xu, Xiaodong Li
Summary: The study proposed a method of using metakaolin as an alternative material to prepare cement mortar, which was found to improve the thickness and adhesion ability of the cement mortar layer. The addition of superhydrophobic metakaolin also promoted the hydration of cement, improving the interface transition zone and enhancing the adhesion ability of the cement mortar to the aggregate, indicating potential for expanding its application in cement-based materials.
JOURNAL OF BUILDING ENGINEERING
(2022)
Article
Construction & Building Technology
Xiaodong Li, Qing Wang, Zengqin Shi, Lulu Lei, Junheng Mao, Lei Qu
Summary: The paper proposed a method for fabricating amphiphobic mortar with excellent water and oil repellency using mixed STA-PFOA modifier, which showed stable hydrophobicity even under different acidic and alkaline conditions. The amphiphobic mortar demonstrated good oil stain resistance and self-cleaning property, reducing water absorption and porosity compared to ordinary mortar, with potential applications in coastal areas.
CONSTRUCTION AND BUILDING MATERIALS
(2022)
Article
Construction & Building Technology
Qingnan Song, Qing Wang, Shuangshuang Xu, Junheng Mao, Xiaodong Li, Yayun Zhao
Summary: This study proposes a method to prepare hydrophobic mortar using superhydrophobic OSP, which reduces oyster shell waste and improves the corrosion resistance of mortar.
CONSTRUCTION AND BUILDING MATERIALS
(2022)
Article
Construction & Building Technology
Junheng Mao, Qing Wang, Mingliang Wang, Xiaodong Li, Shuangshuang Xu, Zengqin Shi
Summary: This study investigates the properties of cement paste coating based on metakaolin and its effectiveness in removing methylene blue from water. The results show that the addition of metakaolin improves the performance of the cement paste coating and enhances the adsorption capacity for methylene blue.
CONSTRUCTION AND BUILDING MATERIALS
(2022)
Article
Construction & Building Technology
Lulu Lei, Qing Wang, Xiaodong Li, Zengqin Shi
Summary: The paper proposes a method for preparing an amphiphobic clam powder coating on concrete surface, which can effectively protect the concrete from damage by oil-based liquids and has good corrosion resistance.
CONSTRUCTION AND BUILDING MATERIALS
(2022)
Article
Construction & Building Technology
Yijie Huang, Tongcheng Wang, Hongli Sun, Chuanxi Li, Lei Yin, Qing Wang
Summary: This study systematically investigates the mechanical properties of fibre reinforced seawater sea-sand recycled aggregate concrete. The research findings indicate that stainless steel fibres can effectively offset the effects of seawater, sea-sand, and recycled aggregates on the concrete's mechanical properties. The fibre content affects the strength and ductility of the concrete, while the fibre type changes the failure pattern and crack propagation speed.
CONSTRUCTION AND BUILDING MATERIALS
(2022)
Article
Green & Sustainable Science & Technology
Zengqin Shi, Qing Wang, Xiaodong Li, Lulu Lei, Lei Qu, Junheng Mao, Haohui Zhang
Summary: This study proposes an environmentally friendly method of incorporating super-hydrophobic modified steel slag into cement-based materials to enhance water resistance and corrosion resistance. The results show that adding super-hydrophobic steel slag reduces the wettability and water absorption of the cement mortar, improves its mechanical strengths, and enhances its corrosion resistance.
JOURNAL OF CLEANER PRODUCTION
(2022)
Article
Chemistry, Physical
Qing Wang, Shuangshuang Xu, Xiaoting Xing, Ning Wang
Summary: This paper reviews the research progress on the fabrication and applications of superhydrophobic surfaces with micro/nanostructures. Different techniques used for fabricating superhydrophobic surfaces and their functional applications are introduced. It is believed that green fabrication and mechanical stability are the future development directions.
SURFACE INNOVATIONS
(2022)
Article
Chemistry, Physical
Shuangshuang Xu, Qing Wang, Ning Wang, Lei Qu
Summary: This study successfully fabricated flexible surfaces with stable superamphiphobicity under stretching by covering superamphiphobic powders. The flexible surfaces exhibited superhydrophobicity, superoleophobicity, and self-cleaning property.
SURFACE INNOVATIONS
(2022)
Article
Pediatrics
So Mi Lee, Hyun-Hae Cho, Sun Kyoung You, Eunji Kim, Seungho Kim, Moon Jung Hwang, Seung Hyun Cho, Byunggeon Park, Jihoon Hong, Sung Won Youn, Yongmin Chang
Summary: This study evaluated the clinical feasibility of time-saving synthetic MRI protocols adjusted for echo train length and receiver bandwidth in pediatric neuroimaging. The results showed that the adjusted protocols can maintain image quality and lesion conspicuity while reducing scan time.
PEDIATRIC RADIOLOGY
(2022)
Article
Polymer Science
Kenta Suzuki, Tatsuya Okawa, Sung-Won Youn
Summary: Droplet-dispensed ultraviolet nanoimprint lithography (UV-NIL) in helium enables adaptive material deposition to match pattern variations in a mold. It is a potential lithographic technology for semiconductor devices, but process throughput is an issue. This study investigates the applicability of a mixed condensable TFP/CTFP gas to droplet-dispensed UV-NIL.
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
(2022)
Article
Engineering, Electrical & Electronic
Bruno Galizia, Patrick Fiorenza, Corrado Bongiorno, Bela Pecz, Zsolt Fogarassy, Emanuela Schiliro, Filippo Giannazzo, Fabrizio Roccaforte, Raffaella Lo Nigro
Summary: This study demonstrates the growth of oriented AlN thin films on 4H-SiC substrates using PE-ALD technique, and investigates the impact of NH3 plasma pulsing on the microstructure and orientation degree of the AlN layers. The structural characterization reveals different polymorphic structures depending on the NH3 plasma pulsing time, and electrical nanoscopic characterization shows a correlation between the AlN crystalline phases and the insulating properties.
MICROELECTRONIC ENGINEERING
(2024)
Article
Engineering, Electrical & Electronic
Theo Levert, Alter Zakhtser, Julien Duval, Chloe Raguenez, Stephane Verdier, Delphine Le Cunff, Jean-Herve Tortai, Bernard Pelissier
Summary: In this study, the robustness of optical constants and optical band gap determination of three different materials is compared using a combination of spectroscopic ellipsometry and energy loss signal of X-ray photoelectron spectroscopy. The hybridization of these two techniques provides a new robust method for determining the band gap of the studied materials and other optical properties over a wide energy range.
MICROELECTRONIC ENGINEERING
(2024)
