Control of metal/oxide electron barriers in CBRAM cells by low work-function liners

Title
Control of metal/oxide electron barriers in CBRAM cells by low work-function liners
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 109, Issue -, Pages 156-159
Publisher
Elsevier BV
Online
2013-03-26
DOI
10.1016/j.mee.2013.03.088

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