Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures

Title
Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 111, Issue -, Pages 214-219
Publisher
Elsevier BV
Online
2013-04-06
DOI
10.1016/j.mee.2013.03.158

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