Sheet resistance measurement on AlGaN/GaN wafers and dispersion study

Published 2013 View Full Article

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Title
Sheet resistance measurement on AlGaN/GaN wafers and dispersion study
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 109, Issue -, Pages 334-337
Publisher
Elsevier BV
Online
2013-04-06
DOI
10.1016/j.mee.2013.03.161

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