Study of Schottky barrier height modulation for NiSi/Si contact with an antimony interlayer

Published 2013 View Full Article

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Title
Study of Schottky barrier height modulation for NiSi/Si contact with an antimony interlayer
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 106, Issue -, Pages 121-124
Publisher
Elsevier BV
Online
2013-01-11
DOI
10.1016/j.mee.2013.01.006

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