Atom probe tomography of SRAM transistors: Specimen preparation methods and analysis

Published 2013 View Full Article

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Title
Atom probe tomography of SRAM transistors: Specimen preparation methods and analysis
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 107, Issue -, Pages 167-172
Publisher
Elsevier BV
Online
2013-01-10
DOI
10.1016/j.mee.2012.12.021

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