Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen

Title
Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 110, Issue -, Pages 60-65
Publisher
Elsevier BV
Online
2013-02-08
DOI
10.1016/j.mee.2012.12.031

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