4.4 Article

Paper-mediated controlled densification and low temperature transfer of carbon nanotube forests for electronic interconnect application

Journal

MICROELECTRONIC ENGINEERING
Volume 103, Issue -, Pages 177-180

Publisher

ELSEVIER
DOI: 10.1016/j.mee.2012.11.007

Keywords

Carbon nanotube; Post-growth processing; Densification; Carbon nanotube transfer; Young's modulus; Carbon nanotube resistance

Funding

  1. EU
  2. Swedish National Science Foundation (VR) [2009-5042]
  3. Chinese Ministry of Science and Technology for the International Science and Technology Cooperation program of China [2010DFA14450]

Ask authors/readers for more resources

We report on the fabrication and characterization of densified and transferred carbon nanotube forests for electronic interconnect application. A simple, low cost and quality method is developed for densifying vertically-aligned carbon nanotube (VA-CNTs) forests at room temperature. Commercially available paper is utilized in this work to serve as a solvent carrier. Highly densified CNT bundles are formed by the sorption of evaporative liquid from the paper into carbon nanotube forests. An average Young's modulus increase from approximately 15.8 to 111.9 MPa is extrapolated from the measured load displacement curves in the compression tests of the as-densified VA-CNTs. Subsequent low temperature transfer method is used to transfer the VA-CNT bundles onto the target substrate. Four-probe measurement of the transferred VA-CNTs shows resistance of 3.70 +/- 0.04 Omega of each CNT bundle. (C) 2012 Elsevier B.V. All rights reserved.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.4
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available