Effective Cu surface pre-treatment for high-reliable 22nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k=2.2)

Title
Effective Cu surface pre-treatment for high-reliable 22nm-node Cu dual damascene interconnects with high plasma resistant ultra low-k dielectric (k=2.2)
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 92, Issue -, Pages 62-66
Publisher
Elsevier BV
Online
2011-02-07
DOI
10.1016/j.mee.2011.01.077

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