Silicon precursor development for advanced dielectric barriers for VLSI technology

Title
Silicon precursor development for advanced dielectric barriers for VLSI technology
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 92, Issue -, Pages 83-85
Publisher
Elsevier BV
Online
2011-05-08
DOI
10.1016/j.mee.2011.04.014

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