Reactive ion etching of polymer materials for an energy harvesting device

Published 2012 View Full Article

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Title
Reactive ion etching of polymer materials for an energy harvesting device
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 97, Issue -, Pages 227-230
Publisher
Elsevier BV
Online
2012-03-31
DOI
10.1016/j.mee.2012.03.016

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