Beam induced deposition of 3D electrodes to improve coupling to cells

Published 2012 View Full Article

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Title
Beam induced deposition of 3D electrodes to improve coupling to cells
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 97, Issue -, Pages 365-368
Publisher
Elsevier BV
Online
2012-04-08
DOI
10.1016/j.mee.2012.03.027

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