A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticles

Title
A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticles
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 97, Issue -, Pages 181-184
Publisher
Elsevier BV
Online
2012-04-10
DOI
10.1016/j.mee.2012.03.021

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