Effects of rapid thermal annealing on the properties of In2O3 thin films grown on glass substrate by rf reactive magnetron sputtering

Published 2011 View Full Article

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Title
Effects of rapid thermal annealing on the properties of In2O3 thin films grown on glass substrate by rf reactive magnetron sputtering
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 89, Issue -, Pages 84-88
Publisher
Elsevier BV
Online
2011-04-19
DOI
10.1016/j.mee.2011.03.147

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