Dynamic study on microstructural evolution of nickel germanide utilizing zirconium interlayer

Title
Dynamic study on microstructural evolution of nickel germanide utilizing zirconium interlayer
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 89, Issue -, Pages 23-26
Publisher
Elsevier BV
Online
2011-04-15
DOI
10.1016/j.mee.2011.03.010

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