Influence of the deposition temperature on the properties of copper thin films prepared by alternating injection of Cu(ethylketoiminate)2 and H2 on a ruthenium substrate

Title
Influence of the deposition temperature on the properties of copper thin films prepared by alternating injection of Cu(ethylketoiminate)2 and H2 on a ruthenium substrate
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 89, Issue -, Pages 27-30
Publisher
Elsevier BV
Online
2011-03-17
DOI
10.1016/j.mee.2011.02.111

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