The role of oxygen-related defects and hydrogen impurities in HfO2 and ZrO2

Published 2011 View Full Article

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Title
The role of oxygen-related defects and hydrogen impurities in HfO2 and ZrO2
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1452-1456
Publisher
Elsevier BV
Online
2011-04-15
DOI
10.1016/j.mee.2011.03.099

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