Initial leakage current related to extrinsic breakdown in HfO2/Al2O3 nanolaminate ALD dielectrics

Published 2011 View Full Article

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Title
Initial leakage current related to extrinsic breakdown in HfO2/Al2O3 nanolaminate ALD dielectrics
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1380-1383
Publisher
Elsevier BV
Online
2011-04-12
DOI
10.1016/j.mee.2011.03.132

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