Multiple replication of thick PDMS micropatterns using surfactants as release agents

Title
Multiple replication of thick PDMS micropatterns using surfactants as release agents
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 11, Pages 3275-3277
Publisher
Elsevier BV
Online
2011-07-08
DOI
10.1016/j.mee.2011.06.027

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