Evanescent-wave interferometric nanoscale photolithography using guided-mode resonant gratings

Published 2010 View Full Article

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Title
Evanescent-wave interferometric nanoscale photolithography using guided-mode resonant gratings
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 2, Pages 170-174
Publisher
Elsevier BV
Online
2010-10-09
DOI
10.1016/j.mee.2010.10.006

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