Remote phonon and surface roughness limited universal electron mobility of In0.53Ga0.47As surface channel MOSFETs

Title
Remote phonon and surface roughness limited universal electron mobility of In0.53Ga0.47As surface channel MOSFETs
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1083-1086
Publisher
Elsevier BV
Online
2011-04-06
DOI
10.1016/j.mee.2011.03.120

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