Electron spin resonance study of defects in low-κ oxide insulators (κ=2.5–2.0)

Title
Electron spin resonance study of defects in low-κ oxide insulators (κ=2.5–2.0)
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1503-1506
Publisher
Elsevier BV
Online
2011-04-21
DOI
10.1016/j.mee.2011.03.077

Ask authors/readers for more resources

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started