Effect of interfacial fluorination on the electrical properties of the inter-poly high-k dielectrics

Published 2011 View Full Article

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Title
Effect of interfacial fluorination on the electrical properties of the inter-poly high-k dielectrics
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 6, Pages 945-949
Publisher
Elsevier BV
Online
2011-02-04
DOI
10.1016/j.mee.2010.12.027

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