A microstructure for thermal conductivity measurement of conductive thin films

Title
A microstructure for thermal conductivity measurement of conductive thin films
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2408-2412
Publisher
Elsevier BV
Online
2011-01-06
DOI
10.1016/j.mee.2010.12.119

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