Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals

Published 2010 View Full Article

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Title
Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 8, Pages 2233-2235
Publisher
Elsevier BV
Online
2010-12-25
DOI
10.1016/j.mee.2010.12.036

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