Post-deposition processing and oxygen content of TiO2-based capacitors

Published 2011 View Full Article

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Title
Post-deposition processing and oxygen content of TiO2-based capacitors
Authors
Keywords
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Journal
MICROELECTRONIC ENGINEERING
Volume 88, Issue 7, Pages 1525-1528
Publisher
Elsevier BV
Online
2011-04-06
DOI
10.1016/j.mee.2011.03.129

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