Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 708-711Publisher
ELSEVIER
DOI: 10.1016/j.mee.2009.12.064
Keywords
Cantilever-based sensing; Microfabrication; SU-8; DVD pickup head; Chip holder
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In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment. (C) 2009 Elsevier B.V. All rights reserved.
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