4.4 Article Proceedings Paper

Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

Journal

MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 708-711

Publisher

ELSEVIER
DOI: 10.1016/j.mee.2009.12.064

Keywords

Cantilever-based sensing; Microfabrication; SU-8; DVD pickup head; Chip holder

Ask authors/readers for more resources

In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment. (C) 2009 Elsevier B.V. All rights reserved.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.4
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available