Micromachining of a newly designed AFM probe integrated with hollow microneedle for cellular function analysis

Published 2009 View Full Article

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Title
Micromachining of a newly designed AFM probe integrated with hollow microneedle for cellular function analysis
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1185-1189
Publisher
Elsevier BV
Online
2009-12-23
DOI
10.1016/j.mee.2009.12.025

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