Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)2cod

Published 2009 View Full Article

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Title
Kinetics of the ruthenium thin film deposition from supercritical carbon dioxide by the hydrogen reduction of Ru(tmhd)2cod
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 4, Pages 566-572
Publisher
Elsevier BV
Online
2009-08-20
DOI
10.1016/j.mee.2009.08.011

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