Mapping of elastic modulus at sub-micrometer scale with acoustic contact resonance AFM

Title
Mapping of elastic modulus at sub-micrometer scale with acoustic contact resonance AFM
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 3, Pages 416-420
Publisher
Elsevier BV
Online
2009-06-01
DOI
10.1016/j.mee.2009.05.028

Ask authors/readers for more resources

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now