Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bonding

Published 2009 View Full Article

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Title
Fabrication of micro/nano fluidic system combining hybrid mask-mould lithography with thermal bonding
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 722-725
Publisher
Elsevier BV
Online
2009-12-17
DOI
10.1016/j.mee.2009.12.024

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