Batch fabrication of cantilever array aperture probes for scanning near-field optical microscopy

Published 2009 View Full Article

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Title
Batch fabrication of cantilever array aperture probes for scanning near-field optical microscopy
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1229-1232
Publisher
Elsevier BV
Online
2009-11-30
DOI
10.1016/j.mee.2009.11.140

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