New approach to estimate nanowear test results through nanoindentation test

Title
New approach to estimate nanowear test results through nanoindentation test
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1404-1409
Publisher
Elsevier BV
Online
2009-12-04
DOI
10.1016/j.mee.2009.11.159

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