Free-standing silicon-nitride zoneplates for neutral-helium microscopy

Title
Free-standing silicon-nitride zoneplates for neutral-helium microscopy
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 5-8, Pages 1011-1014
Publisher
Elsevier BV
Online
2009-11-28
DOI
10.1016/j.mee.2009.11.107

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