Microfabrication of a nickel mold insert by a modified deep X-ray lithography process and its application to hot embossing

Published 2010 View Full Article

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Title
Microfabrication of a nickel mold insert by a modified deep X-ray lithography process and its application to hot embossing
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 87, Issue 12, Pages 2449-2455
Publisher
Elsevier BV
Online
2010-05-11
DOI
10.1016/j.mee.2010.04.023

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