Point defects in Al2O3 and their impact on gate stacks

Published 2009 View Full Article

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Title
Point defects in Al2O3 and their impact on gate stacks
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1756-1759
Publisher
Elsevier BV
Online
2009-03-17
DOI
10.1016/j.mee.2009.03.059

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