Electrical properties of atomic-layer-deposited La2O3 films using a novel La formamidinate precursor and ozone

Published 2009 View Full Article

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Title
Electrical properties of atomic-layer-deposited La2O3 films using a novel La formamidinate precursor and ozone
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1658-1661
Publisher
Elsevier BV
Online
2009-03-17
DOI
10.1016/j.mee.2009.03.056

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