Growth characteristics evaluations on the 3D nanostructure fabrication by the high accuracy control of focused-ion-beam

Published 2009 View Full Article

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Title
Growth characteristics evaluations on the 3D nanostructure fabrication by the high accuracy control of focused-ion-beam
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 4-6, Pages 552-555
Publisher
Elsevier BV
Online
2009-01-27
DOI
10.1016/j.mee.2009.01.037

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