Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Published 2009 View Full Article

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Title
Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1936-1938
Publisher
Elsevier BV
Online
2009-03-12
DOI
10.1016/j.mee.2009.03.029

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