Oxygen vacancy levels and interfaces of Al2O3

Published 2009 View Full Article

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Title
Oxygen vacancy levels and interfaces of Al2O3
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1668-1671
Publisher
Elsevier BV
Online
2009-03-11
DOI
10.1016/j.mee.2009.03.011

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