Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 10, Pages 2104-2109Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2009.02.011
Keywords
Hydrogel-based microvalve; Microfluidic channel; Direct-write microfluidic fabrication process; (DWFP); CMOS; Capacitive sensor
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Funding
- NSERC, IMRST and CMC Microsystems
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In this paper, we propose an efficient microfluidic fabrication process for Lab-on-Chip (LoC) applications. This low temperature process is employed to implement different microfluidic components including microchannels, microvalves as well as microfluidic packaging of CMOS chips. Furthermore. we describe the applicability of this direct-write microfluidic fabrication process (DWFP) for LoCs by demonstrating the experimental results of a thermally-actuated microvalve incorporated with a capacitive sensor. (C) 2009 Elsevier B.V. All rights reserved.
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