Optical proximity correction for a versatile LCD based direct write maskless photoplotter

Published 2009 View Full Article

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Title
Optical proximity correction for a versatile LCD based direct write maskless photoplotter
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 12, Pages 2385-2391
Publisher
Elsevier BV
Online
2009-05-06
DOI
10.1016/j.mee.2009.04.026

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