A mathematical model for slip phenomenon in a cavity-filling process of nanoimprint lithography

Title
A mathematical model for slip phenomenon in a cavity-filling process of nanoimprint lithography
Authors
Keywords
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Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 11, Pages 2324-2329
Publisher
Elsevier BV
Online
2009-04-20
DOI
10.1016/j.mee.2009.04.011

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